Vice-President of APAM, Prof. Fedor A. Kuznetsov
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences,
Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Jun-Ichi Nishizawa ,Toru Kurabayashi*
Semiconductor Research Institute of Semiconductor Research Foundation, Kawauchi, Aoba-ku, Sendai 980-0862 (Japan) *Telecommunications Advancement Organization, Sendai Research Centre, Koeji 19, Nagamachi-Aza Aoba-ku, Sendai 980-0868 (Japan)
As terahertz frequency devices, 100 Å scale ideal static induction transistor (ISIT) was fabricated with GaAs molecular layer epitaxy (MLE). The ISIT is estimated as electron transit time of 2⋅l0–14 s. In order to control the doping MLE at a sidewall in the fabrication process, the doping characteristics on each crystallographic orientation surfaces of GaAs substrate have been studied. In addition, the lateral growth rate on nanometre height step has been estimated by using table method. MLE of Si and SiO2 layers were also tried with investi- gating the surface reaction by using in situ mass spectroscopy. For Si growth, temperature modulation (TM) method was performed using Si2H6 as source gas. SiO2 thin layer was successfully deposited in Si MLE sys- tem by simultaneous supply of Si2H6 and active oxygen from helicon plasma source. Small temperature and pressure dependence of the deposition rate about 0.2–0.3 nm/min is useful for atomic and molecular level controlled process.
Igor’ P. Asanov and Vera M. Paasonen
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Zhibzema G. Bazarova, Svetlana I. Arkhincheyeva, Irina S. Batuyeva, Bair G. Bazarov, Yunna L. Tushinova, Svetlana T. Bazarova and Konstantin N. Fyodorov
Baikal Institute of Nature Management, Siberian Branch of the Russian Academy of Sciences, Ul. Sakhyanovoy 6, Ulan Ude 670047 (Russia)
Svetlana V. Belaya, Nina V. Podberezskaya, Natalia V. Pervukhina, Svetlana A. Magarill, Inga G. Vasilyeva and Stanislav V. Borisov
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Vyacheslav I. Belyi and Alexander A. Rastorguyev
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Alexander S. Berdinsky, Yuri V. Shevtsov*, Alexander V. Okotrub*, Sergey V. Trubin*, Lewis T. Chadderton**, Dietmar Fink# and Jong Hwa Lee@
Novosibirsk State Technical University, Pr. K. Marxa 20, Novosibirsk 630092 (Russia) *Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) **Australian National University, GPO Box 4, Canberra, ACT 2601 (Australia) # Hahn-Meitner-Institut, Glienicker Str. 100, Berlin D-14109 (Germany) @University of Ulsan, P. O. Box 18, Ulsan, Kyungnam, 680-749 (Korea)
Evgeny G. Boguslavsky, Andrey M. Danilenko and Vladimir A. Nadolinny
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Yuri I. Vesnin
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Vladimir V. Volkov, Evgeny A. Il’inchik, Oleg V. Volkov and Ol’ga P. Yuryeva
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Mikhail G. Voronkov, Natalia N. Vlasova and Yuri N. Pozhidayev
Irkutsk Institute of Chemistry, Siberian Branch of the Russian Academy of Sciences, Ul. Favorskogo 1, Irkutsk 664033 (Russia)
Tatiana N. Gerasimova, Natalia A. Orlova, Vladimir V. Shelkovnikov, Zoya M. Ivanova, Roman V. Markov*, Alexander Plekhanov*, Tamara M. Polyanskaya** and Vladimir V. Volkov**
Institute of Organic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 9, Novosibirsk 630090 (Russia) *Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 1, Novosibirsk 630090 (Russia) **Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Romuald L. Dunin-Barkovsky, Igor’ B. Slovtsov, Andrey R. Dunin-Barkovsky*, Ol’ga V. Drozdova**, Boris I. Kidyarov**, Stanislav S. Kolyago**, Evgeny M. Kozhbakhteyev***, Elena E. Lisitsina***, Anatoly A. Mar’in***
Institute of Volcanic Geology and Geochemistry, Far Eastern Branch of the Russian Academy of Sciences, Bulv. Piipa 9, Petropavlovsk Kamchatsky 683006 (Russia) *Bryansk Semiconductor Equipment Plant, Bryansk 241000 (Russia) **Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 13, Novosibirsk 630090 (Russia) ***All-Russian Scientific Research Institute for Mineral Raw Materials Synthesis, Ul. Institutskaya 1, Aleksandrov 601600 (Russia)
Lyudmila N. Zelenina, Tamara D. Karpova, Yuri G. Stenin and Tamara P. Chusova
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Lyudmila I. Isaenko, Alexander P. Yelisseyev*
Design and Technological Institute of Monocrystals, Siberian Branch of the Russian Academy of Sciences, Ul. Russkaya 43, Novosibirsk 630058 (Russia) *Institute of Mineralogy and Petrography, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia)
Victoria G. Isakova, Grygory N. Churilov, Leonid A. Solov’yov, Natalia V. Bulina, Oksana V. Trofimova, Sergey G. Ovchinnikov, Irina E. Sukovataya*
L. V. Kirensky Institute of Physics, Siberian Branch of the Russian Academy of Sciences, Akademgorodok, Krasnoyarsk 660036 (Russia) *Institute of Biophysics, Siberian Branch of the Russian Academy of Sciences, Akademgorodok, Krasnoyarsk 660036 (Russia)
Vitaly P. Isupov, Lyudmila E. Chupakhina, Raisa P. Mitrofanova and Konstantin A. Tarasov
Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch of the Russian Academy of Sciences, Ul. Kutateladze 18, Novosibirsk 630090 (Russia)
Alexander B. Kaplun and Arkady B. Meshalkin
S. S. Kutateladze Institute of Thermophisics, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 1, 630090 (Russia)
Boris I. Kidyarov, Victor I. Kosyakov*
Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 13, Novosibirsk 630090 (Russia) *Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Sergey V. Kovalevsky and Irina R. Shelpakova
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Lyudmila P. Kozeyeva, Margarita Yu. Kameneva, Alexander N. Lavrov, Vladimir Ye. Fedorov, Vasili I. Alekseyev, Ellina V. Sokol*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *Institute of Mineralogy and Petrography, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia)
Victor I. Kosyakov, Vladimir A. Shestakov, Ninel A. Pylneva*, Zhibzema G. Bazarova**
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *United Institute of Geology, Geophysics and Mineralogy, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia) **Baikal Institute of Nature Management, Siberian Branch of the Russian Academy of Sciences, Ul. Sakhyanovoy 6, Ulan Ude 670047 (Russia)
Victor I. Kosyakov and Vladimir I. Shestakov
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Pavel G. Krinitsyn, Yuri A. Chulzhanov, Sergey P. Popov*
Institute of Mineralogy and Petrography, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia) *High Purity Materials Co. Ltd., Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia)
Vladimir A. Logvinenko and Vera M. Paasonen
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Vladimir A. Logvinenko, Nikolay F. Yudanov, Galina N. Chekhova, Yuri G. Kriger, Lyudmila I. Yudanova, Nina A. Rudina*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *G. K. Boreskov Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 5, Novosibirsk 630090 (Russia)
Tatiana N. Moroz, Yekaterina N. Fedorova, Sergey M. Zhmodik, Gennady M. Rylov, Aleksey L. Ragozin, Anatoly D. Afanasyev, Anatoly G. Mironov*, Vladimir I. Zaikovsky**
United Institute of Geology, Geophysics and Mineralogy, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Koptyuga 3, Novosibirsk 630090 (Russia) *Geological Institute, Siberian Branch of the Russian Academy of Sciences, Ul. Sakhyanovoy 6a, Ulan-Ude 640047 (Russia) **G. K. Boreskov Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 5, Novosibirsk 630090 (Russia)
Victor N. Naumov, Galina I. Frolova, Veronika V. Nogteva, Pavel A. Stabnikov, Vladimir A. Nadolinny, Yuri G. Shvedenkov and Igor’ K. Igumenov
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Victor N. Naumov, Vladimir P. Shpakov, Igor’ K. Igumenov, Vladimir R. Belosludov, Nikolay A. Nemov, Pavel A. Stabnikov, Galina I. Frolova and Veronika N. Nogteva
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Victor N. Naumov, Galina I. Frolova and Veronika V. Nogteva
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Victor N. Naumov, Galina I. Frolova, Veronika V. Nogteva, Nata I. Matskevich and R. William Mccallum*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *Iowa University, Ames Laboratory, Ames IA 50011-3020 (USA)
Vladimir A. Neronov, Mikhail A. Korchagin*
Institute of Theoretical and Applied Mechanics, Siberian Branch of the Russian Academy of Sciences, Ul. Institutskaya 4/1, Novosibirsk 630090 (Russia) *Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch of the Russian Academy of Sciences, Ul. Kutateladze 18, Novosibirsk 630090 (Russia)
Oleg V. Polyakov, Aram M. Badalyan and Vyacheslav I. Belyi
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
Oleg V. Polyakov, Aram M. Badalyan, Ìargarita V. Kaletina, Vyacheslav I. Belyi, Àlevtina S. Zanina*, Sofia I. Shwrgina* and Mark S. Shwartsberg*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *Institute of Chemical Kinetics and Combustion, Siberian Branch of the Russian Academy of Sciences, Ul. Institutskaya 3, Novosibirsk 630090 (Russia)
Tamara M. Polyanskaya, Vladimir V. Volkov, Caroline Price*, Ìark Thornton-Pett* and John D. Kennedy*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *School of Chemistry, University of Leeds, LS2 9JT Leeds (UK)
Tamara M. Polyanskaya, Vladimir V. Volkov, Caroline Price*, Ìark Thornton-Pett* and John D. Kennedy*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *School of Chemistry, University of Leeds, LS2 9JT Leeds (UK)
