Numerical method for cavity alignment by output beam image
M.V. Andreev1, S.M. Bobrovnikov2, E.V. Gorlov2, Yu.N. Panchenko1, A.V. Puchikin1, V.I. Zharkov2
1High Current Electronics Institute of the Siberian Branch of the RAS, 634055, Tomsk, 2/3, Academichesky ave. HCEI SB RAS
2V.E. Zuev Institute of Atmospheric Optics of Siberian Branch of the Russian Academy of Science, 1, Academician Zuev square, Tomsk, 634021, Russia
Keywords: эксимерный лазер, обработка изображений, методы бинаризации, лазерный пучок, резонатор, интенсивность излучения, excimer laser, image processing, binarization methods, laser beam, cavity, radiation intensity
Abstract
Numerical and experimental studies of the control of optical elements of the KrF-laser cavity using the image processing method are carried out. Different image binarization methods are considered as applied to determining the boundary dimensions and equalizing the intensity distribution of the laser beam. Conditions for rapid adjustment of the dispersion cavity in automatic mode of laser operation are ascertained, and the initial parameters of the output beam are retrieved within 5%.
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