Specific Features of Operation of Electrostatic Microgenerators of Energy
V. P. Dragunov, E. G. Kostsov
Keywords: microelectromechanics, electrostatics, microgenerator of energy, microvibration
Pages: 62-73
Abstract
Specific features of operation of one- and two-capacitor microelectromechanical converters (MEMC) of energy of mechanical microscopic vibrations into electric energy with a modulated electrode-gap magnitude and with allowance for the mutual influence of electrical and elastic forces are analyzed, and the characteristics of these two devices are compared. The main factors restricting the increase in MEMC power are demonstrated to be the effects of "collapsing" and the condition of conservation of positive rigidity of the system. Expressions for estimating the limiting MEMC parameters are derived. The possibility of electrical energy generation in the presence of "real" sources of wide-spectrum microscopic vibrations is considered.
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