Status and Prospects of Micro- and Nanoelectromechanics
E. G. Kostsov
Keywords: microelectromechanics, MEMS, electromechanical conversion of energy, microelectronics, microoptics, optoelectromechanics, adaptive optics, frequency generator, accelerometer, gyroscope, microactuator, nanoelectromechanics, RF commutator, RF filter, pressu
Pages: 3-52
Abstract
Micro-electro-mechanical systems (MEMS) are devices that display the most intense development in modern microelectronics. At the moment, however, the majority of electronic engineers and users of hi-tech devices do not possess sufficient general information about this new direction in microelectronics. The present paper describes the current status of this direction, numerous possible applications, and prospects of its further development, including the transition to the nanometer range and creation of nanoelectronic elements. Specific features of operation of some particular MEMS devices, their characteristics, and areas and scales of applications are considered.
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