Synthesis of silicon carbide nanopowders in a two-jet plasma-chemical reactor
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A.S. Anshakov1,2, E.K. Urbakh† 1, A.E. Urbakh1, V.A. Faleev1, and V.S. Cherednichenko2
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1Kutateladze Institute of Thermophysics SB RAS, Novosibirsk, Russia
2Novosibirsk State Technical University, Novosibirsk, Russia
E-mail: anshakov@itp.nsc.ru
Keywords: two-jet plasmatorch, silicon carbide, plasma-chemical reactor, silicon dioxide, carbon, methane, synthesis, nanosized particle
Pages: 459–467
Abstract
Results of
experimental studies on production of nanostructured silicon carbide powders in
a plasma-chemical reactor based on a two-jet plasmatorch are presented. The
conditions of SiC formation as a function of temperature and composition of the
initial components are determined by thermodynamic calculations. Possibility of
silicon carbide synthesis with the size of particles of 5-20 nm is shown experimentally.
DOI: 10.1134/S0869864317030131
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