The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride
A.G. Plekhanov, N.I. Fainer, Yu.M. Rumyantsev, I.V. Yushina, M.I. Rakhmanova
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia
Keywords: оксикарбонитрид кремния, нанокомпозитные пленки, 1,1,3,3-тетраметилдисилазан, рентгенофазовый анализ с использованием синхротронного излучения, оптические, электрофизические и люминесцентные свойства, silicon oxycarbonitride, nanocomposite films, 1,1,3,3-tetramethyldisilazane, powder X-ray diffraction analysis with synchrotron radiation, optical, electrophysical, and luminescent properties
Abstract
Films of hydrogenated SiC x N y O z :H obtained by plasma-enhanced chemical vapor deposition from a mixture of 1,1,3,3-tetramethyldisilazane with oxygen and nitrogen (TMDS+O2+ x N2) in the temperature range 373-973 K are nanocomposites in whose amorphous part nanocrystals belonging to phases of the Si-C-N: -Si3-x C x N4 system and graphite are distributed. A change in the chemical composition of gas mixtures enables the preparation of SiC x N y O z :H films with a broad variation range of the functional properties, such as the 1.45-2.15 variation of the refractive index; the controlled transparency ( T 92-99.7 %) in UV, visible, and IR spectral ranges; tunable characteristics of the band gap (3.5-5.4 eV), and dielectric constants (5.2-5.8).
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