Investigation of small linear displacement sensor with two phase diffraction gratings
V. A. Komotskii, V .I. Korolkov, and Yu. M. Sokolov
Peoples Friendship University of Russia Moscow vkomotskii@sci.pfu.edu.ru
Pages: 90-95
Abstract
An improved optoelectronic small linear displacement sensor based on laser beam diffraction on two phase diffraction gratings is proposed and investigated. The possibility of doubling the region of linearity while detecting signals in the first two diffraction orders is shown. A device for measuring surface irregularities is designed using this sensor. Experiments on measuring surface profiles of relief structures are carried out.
