Structure of the Boron Nitride Films Obtained by RPECVD from Borazine
Tamara P. Smirnova, Masami Terauchi*, Futami Sato*, Kichiro Shibata* and Michiyoshi Tanaka*
Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia) *Research Institute for Scientific Measurements, Tohoku University, 2-1-1 katahira, Aoba-ku, Sendai 980-8577 (Japan)
