A New Ecologically Safe Method of the Deposition of Silicon Nitride Layers in a Quasi-Closed Low Pressure Reactor
Ol'ga. I. Semyonova, Konstantin P. Mogil’nikov and Sergey M. Repinsky
Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 13, Novosibirsk 630090 (Russia)
