SIMULATION OF THE PROCESS OF FORMATION OF STEEP PORTIONS OF A PIECEWISE-CONTINUOUS PROFILE IN A SINGLE-STAGE TECHNOLOGY FOR WRITING DIFFRACTIVE OPTICAL ELEMENTS BY INCLINED LASER BEAMS
V. P. Kir'yanov1, V. G. Nikitin2
1Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, prosp. Akademika Koptyuga 1, 630090, Russia Novosibirsk
2Hong Kong Applied Science and Technology Research Institute, 2 Science Park East Avenue, Hong Kong Science Park, Shatin, Hong Kong
Keywords: дифракционная эффективность, технология записи, профили ДОЭ, контраст фоторезистов, обратные скаты дифракционных зон, наклонные пучки, diffraction efficiency, writing technology, diffractive optical element profiles, photoresist contrast, inverse slopes of diffraction zones, inclined beams
Abstract
This paper presents the results of modeling the most important component of a one-stage technology of writing kinoform lenses in thick photoresist layers with increased diffraction efficiency, involving the formation of reverse slopes of Fresnel zones with a steepness up to 90º by means of inclined laser beams. It is shown that this technique for writing volumetric structures in photoresists with low contrast (k = 3) make it possible to significantly increase the steepness of the inverse slopes of the zones, and in photoresists with an average contrast (k = 10), to form practically steep slopes.
|
