MICROELECTROMECHANICAL DIFFRACTION GRATINGS: AREAS OF APPLICABILITY AND PROSPECTS
E. G. Kostsov, I. V. Knyazev
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
kostsov@iae.nsk.su
Keywords: MEMS, diffraction gratings, electrostatics, ferroelectric
Abstract
The structure and specific features of operation of microelectromechanical systems, micromirror devices, and diffraction gratings controlled by an electric field are considered. Elements of microelectromechanical diffraction gratings and some applied problems solved with the use of these gratings are described. A new element of the microelectromechanical diffraction grating based on using dielectric materials with a high dielectric permeability in the gap between the electrodes is proposed. As compared with available analogs, this element has a lower control voltage, a higher clock frequency, and better processability. The characteristics of the new element and available analogs are compared.
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