Low-Pressure Ferromagnetic-Enhanced Inductive Discharge for Ion-Plasma Treatment
M. V. Isupov, V. A. Pinaev
Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: inductively coupled plasma, electronegative plasma, transient discharge
Abstract
The generation of a low-frequency low-pressure inductive discharge with ferromagnetic enhancement of the magnetic coupling between the inductor and plasma is investigated. The main features and advantages of this plasma generation method for surface ion-plasma treatment technologies are considered. New experimental data on electrophysical and dynamic characteristics of ferromagnetic-enhanced low-pressure inductive discharge in argon with the addition of oxygen are presented. It is shown that the radial distribution of plasma parameters in a gas-discharge chamber can be controlled using distributed discharge generation. Significant fluctuations in the electron temperature during the period of oscillations of the discharge electric field are found, and the mechanism of their occurrence is analyzed.
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