Improving the stability of the optical system of a laser source based on a position-sensitive sensor
L. Hongda1, M.V. Andreev2, Yu.N. Panchenko2, A.V. Puchikin2
1Shenyang Ligong University, Liaoning, No.6, Shenyang, China
2High Current Electronics Institute of the Siberian Branch of the RAS, Tomsk, Russia
Keywords: KrF-laser, alignment automation, optical system, filtration methods
Abstract
The results of numerical and experimental studies on the control and management of optical elements of an electric-discharge KrF laser using the developed method based on DBSCAN are presented. Various methods for processing the data obtained from the position-sensitive detectors and a possibility of using the DBSCAN algorithm to increase the speed of the optical system alignment automation device are considered. The conditions for correcting controlled mirrors with an accuracy of their return of 60 ± 10 mrad are determined. The adjustment time does not exceed 5 min.
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