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Avtometriya

2021 year, number 5

MICROCAVITY FOR SINGLE QUANTUM DOT BASED EMITTERS

I. A. Derebezov1,2, A. V. Gaisler1, A.Y. Mironov1, V. A. Gaisler1
1Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Siberian State University of Telecommunications and Information Science, Novosibirsk, Russia
Keywords: Semiconductor quantum dots, microcavity, single photon emitters, emitters of entangled photon pair

Abstract

The design of microcavity for single quantum dot based emitters has been developed. The microcavity consists of semiconductor distributed Bragg reflector and microlens, fabricated by selective oxidation of gradient AlXGa1-XAs layer. The microcavity demonstrates high level of external quantum efficiency up to 70%. This microcavity can be used in the development of a single quantum dot based single photon emitters or emitters of entangled photon pairs.