BOLOMETRIC FOCAL PLANE ARRAYS WITH HIGH OPERATING SPEED
R.Z. Khafizov, V.V. Startsev, V.Y. Moskvichev
ASTROHN Technology Ltd, Moscow region, Lytkarino, Russia
Keywords: infrared radiation, microbolometer, photodetector, optoelectronic systems, microelectromechanical systems, signal-to-noise ratio, noise-equivalent temperature difference
Abstract
Theoretical relations that optimize the design of the microbolometric elements of the FPA providing an improvement in its operating speed are presented. The requirements for the parameters of the elements and the materials used for its manufacture are formulated, which provide a fundamental opportunity to minimize the thermal relaxation time of a bolometric sensor in order to increase the frame frequency of the FPA. The results of their modeling are presented, which make it possible to optimize the design and its implementation using modern technological processes for the formation of microbolometric elements with high operating speed, taking into account the requirements of specific applications.
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