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Avtometriya

2021 year, number 3

MAXIMUM SPECIFIC POWER OF CAPACITIVE ELECTROSTATIC MOTORS WITH A METAL - THIN-FILM FERROELECTRIC STRUCTURE

I.L. Baginsky
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: electrostatics, nanogap, motor, ferroelectric, free metal film, maximum specific power

Abstract

The value of the limiting specific power of capacitive electrostatic motors with a metal - thin-film ferroelectric structure with a large specific capacity - nanogap - movable electrode is determined. The maximum possible frequency of power conversion for such motors is estimated. Using the previously determined value of the limiting energy density for energy converters based on such structures, it is shown that the limiting power reaches 5· 108 W / kg and exceeds the power of inductive motors by 5 orders of magnitude.