METHOD OF COMPENSATING FOR TRAJECTORY DISTORTIONS OF RELATIVE MOTION OF THE WRITING BEAM IN LASER IMAGE GENERATORS WITH CIRCULAR SCANNING
A. V. Kiryanov1,2, V. P. Kiryanov1
1Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk State Technical University, Novosibirsk, Russia
Keywords: лазерный генератор изображений, шпиндельный узел, датчик биений оси вращения, оптический дефлектор, погрешность формирования, лазерный интерферометр, laser image generator, spindle system, sensor of rotation axis beatings, optical deflector, formation error, laser interferometer
Abstract
Proposals on compensation for distortions of circular trajectories implemented in laser image generators with circular scanning for increasing the accuracy of synthesis of the topology of optical elements being formed are analyzed. The expected gain in the accuracy of the element formation topology is estimated with the use of a photoelectric method of detecting the beatings of the axis of rotation of the laser generator spindle rotor
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