IMPROVEMENT IN THE RELIABILITY OF INTERFERENTIAL MEASUREMENTS USING MULTIPLE WAVES LENGTH
I. A. Vykhristyuk, R. V. Kulikov, E. V. Sysoev
Design and Technological Institute of Scientific Instrument Engineering, Siberian Branch, Russian Academy of Sciences, ul. Russkaya 41, Novosibirsk 630058
Keywords: рельеф поверхности, интерференционные измерения, частично когерентная интерферометрия, многоволновые измерения, surface topography, interference measurements, partially coherent interferometry, multiwave measurements
Abstract
Methods are proposed to improve the reliability of interference measurements of surface nanotopography with sharp height gradients that lead to ambiguity in determining the phase of interference signals. The effect of the total error of measurement on the range of multiwave measurements is considered. The results of field experiments demonstrating an increase in the range of measurements of nanotopography by the proposed methods in comparison with single-wave measurements are given.
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