Synthesis of Diamonds from the Microwave Plasma with the use of Supersonic Gas Flows
A. K. Rebrov1, M. V. Isupov1, A. Yu. Litvintsev1, V. F. Burov2
1Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia
2Joint-Stock Company "ZiO-KOTES", Novosibirsk, 630049, Russia
Keywords: синтез алмазов, микроволновая плазма, резонансная камера, сопло, смесь водорода и метана, высокоскоростной поток, вакуум, diamond synthesis, microwave plasma, resonance chamber, nozzle, hydrogen--methane mixture, high-velocity flow, vacuum
Abstract
A new method of deposition of diamond films with the use of supersonic gas flows activated by a superhigh-frequency discharge is implemented for the first time. The operation principle of the proposed gas-discharge system is similar to that of a microwave electrothermal rocket engine. A mixture of hydrocarbons and hydrogen is used as a plasma-forming gas. It is demonstrated that the proposed method allows the plasma-forming gas to be used at pressures far above the upper limit of the working pressures of modern gas-discharge devices of film deposition in the plasma generated by a superhigh-frequency discharge (approximately 40000 Pa).
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