DYNAMIC CORRECTION OF THE LASER BEAM COORDINATE IN WRITING LARGE-DIAMETER DIFFRACTIVE ELEMENTS FOR TESTING ASPHERICAL MIRRORS
R. V. Shimansky, A. G. Poleshchuk, V. P. Korolkov, V. V. Cherkashin
Institute of Automation and Electrometry, Siberian Branch Russian Academy of Sciences, prosp. Akademika Koptyuga 1, Novosibirsk 630090
Keywords: дифракционные оптические элементы, лазерная запись, нанопозиционирование, diffractive optical elements, laser writing, nanopositioning/
Abstract
This paper presents a method for increasing the accuracy of operation of a circular laser system for writing large-diameter diffractive optical elements in a polar coordinate system and the results of its use. An algorithm for correcting positioning errors of a circular laser writing system developed art the Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of Sciences. Showing manufactured using High-precision diffractive optical elements developed by this method and the results of using these elements for testig the 6.5 m diameter aspheric mirror of the James Webb new space telescope are described.
|
