NEW VOLATILE ZIRCONIUM(IV) COMPLEX WITH METHOXY SUBSTITUTED О’-DIKETONATE
V. V. Krisyuk1, I. A. Baidina1, A. E. Turgambaeva1, I. V. Korolkov1,2, S. Urkasym kyz1, I. K. Igumenov1
1Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk National Research State University, Novosibirsk, Russia
Keywords: цирконий, дикетонаты, кристаллическая структура, летучий металлорганический комплекс, MOCVD прекурсор, zirconium, diketonates, crystal structure, volatile organometallic complex, MOCVD precursor
Abstract
A new zirconium(VI) complex with fluorinated methoxy substituted b-diketonate ZrL4 is synthesized where L = 1,1,1-trifluoro-5-methoxy-5-methylhexane-2,4-dionate. The complex sublimates without decomposition at a low pressure (10-2 Torr) at 140 °C. The crystal structure of the complex is molecular and composed of mononuclear ZrL4 molecules. Crystallographic data for C32H40F12O12Zr are: C2/c, a = 12.193(2) Å, b = 21.922(4) Å, c = 15.585(3) Å, β = 101.51(3)°, V = 4082.1(14) Å3, Z = 4, d = 1.523 g/cm3. The coordination environment of the zirconium atom is formed by eight oxygen atoms of four b-diketonate ligands; the coordination polymer is a square antriprism. The Zr-O distances are in the range 2.16-2.19 Å. The thermal properties of the complex are studied by TG-DTA.
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