Publishing House SB RAS:

Publishing House SB RAS:

Address of the Publishing House SB RAS:
Morskoy pr. 2, 630090 Novosibirsk, Russia



Advanced Search

Journal of Structural Chemistry

2017 year, number 1

STRUCTURE AND ELEMENTAL COMPOSITION OF TRANSPARENT NANOCOMPOSITE SILICON OXYCARBONITRIDE FILMS

N. I. Fainer1, A. G. Plekhanov1, A. N. Golubenko†2, Yu. M. Rumyantsev1, E. A. Maksimovskii1, V. R. Shayapov1
1Nikolayev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk National Research State University, Novosibirsk, Russia
Keywords: оксикарбонитрид кремния, нанокомпозитные пленки, 1,1,3,3-тетраметилдисилазан, плазмохимическое осаждение, silicon oxycarbonitride, nanocomposite films, 1,1,3,3-tetramethyldisilazane, plasma enhanced chemical vapor deposition

Abstract

Based on thermodynamic simulation data on the deposition of condensed phases with the complex composition in the Si-C-N-O-H system in a wide temperature range, using initial gas mixtures of 1,1,3,3-tetramethyldisilazane (HSi(CH3)2)2NH (TMDS), TMDS with a variable mixture of oxygen and nitrogen (O2+ xN2), a method is developed to obtain SiCxNyOz:H nanocomposite films by the plasma chemical decomposition of this gas mixture in the temperature range of 373-973 K. By FTIR and energy dispersive X-ray spectroscopy the structure of chemical bonds and the elemental composition of the obtained silicon oxycarbonitride films are studied. The in situ composition of the initial gas phase in PECVD processes is examined by optical emission spectroscopy.