EXPERIMENTAL METHOD OF FABRICATION OF A MATCHED METAL-DIELECTRIC STRUCTURE FOR A SENSOR BASED ON THE EFFECT OF FRUSTRATED TOTAL INTERNAL REFLECTION
V. S. Terent’ev, V. A. Simonov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
Keywords: нарушение полного внутреннего отражения, тонкая металлическая плёнка, металл-диэлектрическая интерференционная структура, сенсорика коэффициента преломления, frustrated total internal reflection, thin metal film, metal-dielectric interference structure, refractive index sensorics
Abstract
An experimental method of fabrication of a sensor based on a metal-dielectric structure (Al + ZnS) and optimization of its characteristics is described. The coefficient of light reflection ( p -polarization) from the aluminum layer is studied as a function of the layer thickness for different angles of incidence at the wavelength of 532 nm. Based on calculations, which are qualitatively consistent with experimental results, a structure consisting of matched layers of aluminum and zinc sulfide is fabricated; this structure has a higher angular resolution than the aluminum film with no dielectric coating. The detection limit of angular measurements by the sensor based on this structure is estimated as 2.6 · 10
-5 RIU (refraction index units).
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