ANALYSIS OF THE ERROR OF MEASURING THE CAPACITY OF SEMICONDUCTOR STRUCTURES AT A HIGH FREQUENCY
V. N. Vyukhin
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
Keywords: измерение ёмкости полупроводниковых структур, ошибки измерения, тестовый сигнал, измерительная цепь, ёмкостный делитель, интегратор, measuring the capacity of semiconductor structures, measurement error, test signal, measurement circuit, capacity divider, integrator
Abstract
The error of measuring the capacity of semiconductor structures at a high frequency by an integrator-based measurement circuit is studied theoretically and experimentally. Relations derived for calculating this error allow one to choose the measurement circuit parameters correctly for particular conditions.
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