ANALYSIS OF THE ERROR OF MEASURING THE CAPACITY OF SEMICONDUCTOR STRUCTURES AT A HIGH FREQUENCY
V. N. Vyukhin
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
Keywords: измерение ёмкости полупроводниковых структур, ошибки измерения, тестовый сигнал, измерительная цепь, ёмкостный делитель, интегратор, measuring the capacity of semiconductor structures, measurement error, test signal, measurement circuit, capacity divider, integrator
Subsection: AUTOMATION SYSTEMS IN SCIENTIFIC RESEARCH AND INDUSTRY
Abstract
The error of measuring the capacity of semiconductor structures at a high frequency by an integrator-based measurement circuit is studied theoretically and experimentally. Relations derived for calculating this error allow one to choose the measurement circuit parameters correctly for particular conditions.
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