INSTRUMENT FOR MEASURING TEMPERATURE DEPENDENCES OF CHARACTERISTICS OF SEMICONDUCTOR STRUCTURES
V. N. Vyukhin, Yu. A. Popov
Institute of Automation and Electrometry, ul. Akademika Koptyuga 1, Novosibirsk, 630090 Russia
vvn@iae.nsk.su
Keywords: measuring circuit, measuring head, semiconductor structures, delta-sigma ADC, amplifier
Abstract
This paper presents an instrument designed to study temperature dependences of the small-signal capacitance and current of semiconductor structures in the range from −180 to +300 ºC.
|
