ELLIPSOMETRIC DETERMINATION OF THE STRUCTURE OF NANOSCALE POROUS LAYERS
K. P. Mogil'nikov, O. I. Semenova
Keywords: adsorption, thin porous films, ellipsometry, Young modulus
Pages: 926-931
Abstract
A new ellipsometric method is proposed to measure adsorption in thin layers directly in a stream of vapors of volatile liquid and inert gas at atmospheric pressure. The method enables the determination of the main structural parameters of nano- and microporous materials: the average pore size, pore surface, size pore distribution, and the total porosity of sorbents. A procedure to find the Young modulus in nanoscale porous layers with the use of a spectroellipsometer is described.
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