elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy
Y. M. Rumyantsev, N. I. Fainer, E. A. Maximovskii, B. M. Ayupov
Keywords: silicon carbonitride, thin films, nanocrystals, structure, elemental composition, energy dispersive spectroscopy
Pages: 182-187
Abstract
Specific features of elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy (EDS) are considered. The films were preliminarily examined by IR spectroscopy, X-ray photoelectron spectroscopy (XPS), scanning electron (SEM) and atomic force microscopy (AFM), and X-ray diffraction analysis using synchrotron radiation (SR-XRD) to acquire data on their chemical and phase composition, crystalline structure and surface morphology. The effect of film thickness, substrate material and electron beam energy on the results of energy dispersive analysis was investigated.
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