STRUCTURE OF Ir-Al2O3 COATINGs OBTAINED BY CHEMICAL VAPOR DEPOSITION IN THE HYDROGEN ATMOSPHERE
N. V. Gelfond, N. B. Morozova, I. K. Igumenov, E. S. Filatov, S. A. Gromilov, R. I. Kvon
Keywords: Ir and Ir-Al2O3 composite coatings, chemical vapor deposition, iridium(III), aluminum(III), tris-acetylacetonates
Pages: 955-959
Abstract
Chemical vapor deposition is used to obtain Ir and Ir-Al2O3 coatings with a thickness of up to 5 μm and growth rate of 2.5 μm/h on steel substrates previously covered with an alumina layer. Tris-acetylacetonates of Ir(III) and Al(III) are used as precursors. The deposition process is carried out at the atmospheric pressure in the presence of hydrogen. The coatings obtained are studied by X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy. A dependence of the structure and composition of coatings on their preparation conditions is found.
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