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Avtometriya

2011 year, number 5

Optical Properties and Morphology of Diamond-Like Films Obtained in a Supersonic Flow of a Hydrocarbon Plasma

S. N. Svitasheva1, G. A. Pozdnyakov2, D. V. Sheglov1, Y. V. Nastaushev1
1 Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
2 Khristianovich Institute of Theoretical and Applied Mechanics, Siberian Branch, Russian Academy of Sciences
Svitasheva@thermo.isp.nsc.ru, georg@itam.nsc.ru, nast@thermo.isp.nsc.ru, Sheglov@thermo.isp.nsc.ru
Keywords: spectroscopic ellipsometry, atomic-force microscopy, diamond-like carbon films, MHD accelerator of the plasma
Pages: 59-66

Abstract

A possibility of using a new method of film synthesis in a supersonic flow of a hydrocarbon plasma generated by a disk-type magnetohydrodynamic accelerator is demonstrated. Two methods are used for characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and atomic-force microscopy.