Nano- and Micrometrology at PTB: State of the Art and Future Challenges
H. Bosse, L. Koenders, F. Hartig, E. Buhr, G. Wilkening
Keywords: dimensional (linear and angular) metrology, micrometrology, nanometrology, signal modeling
Pages: 19-25
Abstract
In this paper we will provide an overview of methods and instruments developed and applied at the National Metrology Institute of Germany (Physikalisch Technische Bundesanstalt - PTB) for high-precision dimensional (linear and angular) measurements and discuss some challenges for future developments in this important area of metrology.
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