Home – Home – Jornals – Avtometriya 2008 number 5

A numerical model of processes in glow discharge plasmas is presented. The model is intended for simulating the work of plasma deposition reactors. One type of ion is considered. The ion and electron plasma components are modeled by kinetic equations with collisions. An effective parallel algorithm for modeling the processes in monosilane plasmas is designed; its main characteristics are given. Results of numerical modeling using the model are adequate to data obtained in physical experiments.