Publishing House SB RAS:

Publishing House SB RAS:

Address of the Publishing House SB RAS:
Morskoy pr. 2, 630090 Novosibirsk, Russia



Advanced Search

Avtometriya

2008 year, number 5

Measuring Silicon Monocrystal DiametersDuring Melt Growth

V. I. Kozik, E. S. Nezhevenko
Pages: 12-23

Abstract

Measuring crystal diameters during Czochralski growth is investigated. An image of the crystallization meniscus zone is analyzed. Informative parameters are determined for finding crystal diameters. An algorithm for calculating the diameter of meniscus applied for crystal growth control is described. Results on operation of a sensor using the algorithm during real crystal growth are presented.