Accelerated combined PIC-MCC algorithm for computation of capacitive radio-frequency discharge
V.A. Shveygert and I.V. Shveygert
Khristianovich Institute of Theoretical and Applied Mechanics SB RAS, Novosibirsk, Russia
Pages: 435-444
Abstract
A new combined numerical algorithm PIC-MCC (the particle-in-cell method with the collisions modelling by the Monte Carlo method) has been developed for a rapid computation of a radio-frequency (RF) discharge under a low pressure and a high plasma concentration. The results of test computations for various regimes of the capacitive RF discharge glow in argon and helium well agree with experimental data. A high efficiency of the new approach (the combined PIC-MCC algorithm) is demonstrated for modelling the electrons heating in the collisionless regime.
|
