Gas-jet deposition of diamond coatings with microwave activation of precursor gases: features, potential, and prospects
M.Yu. Plotnikov, A.A. Emelianov, A.I. Safonov, N.I. Timoshenko, I.B. Yudin, A.K. Rebrov
S.S. Kutateladze Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia
Keywords: diamond coating, microwave plasma, gas-jet deposition, chemical vapor deposition
Abstract
A gas-jet method for depositing diamond coatings with gas activation by a microwave discharge is considered. A distinctive feature of this method is the use of a high-speed jet to transport gases activated by microwave plasma in the discharge chamber to the substrate located in the deposition chamber. This approach opened up new possibilities in the field of gas-phase diamond synthesis, but its development required systematic research. The effectiveness of this method is demonstrated. The success of the study is due to a systematic numerical and experimental study of individual processes involved in the gas-jet synthesis of diamond coatings. Accumulated international experience in the development and optimization of the "classical" MPCVD method served as a starting point for choosing development and optimization paths for the gas-jet method. Methodologies were developed that allowed for studying the influence of individual processes and obtaining a number of new results in the field of gas-phase synthesis of diamond coatings. It was established that a gas-jet method using microwave discharge to activate precursor gases enables the deposition of diamond coatings on substrates made of various materials suitable for various applications. The possibility of producing diamond coatings with various structures was established. Gas-jet synthesis using a hydrogen-argon-methane mixture yielded diamond coatings with a growth rate of up to 200 μm/h. Diamond coating of molybdenum substrates significantly increased their erosion resistance compared to uncoated molybdenum and tungsten carbide. The analysis allowed us to summarize the results obtained during the development of this method and to understand the influence of various processes on the synthesis of diamond coatings.
|
