HIGH-POWER TELECENTRIC F-THETA LENS FOR LASER WORKSTATION
C. G. Baev1, T. N. Khatsevich2, E. V. Druzhkin3
1Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Siberian State University of Geosystems and Technologies, Novosibirsk, Russia
3PC LUGGAR LLC, Novosibirsk, Russia
Keywords: F-Theta lens, telecentric trace, scanning spot scan path, the width of the lines on the optical scales
Abstract
The results of the development of a high-aperture telecentric F-Theta lens for a laser workstation using a femtosecond laser as a radiation source and designed for the production of optical grids and scales on elements of optical and mechanical industry products are presented. The features of lens alignment are discussed. The results of experimental studies confirming the possibility of recording optical scales with a minimum line width of 0.003 (for field is 6x6 mm) to 0.002 mm (for field is 3x3 mm) are presented.
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