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Avtometriya

2025 year, number 6

HEAT FLUX SENSOR BASED ON THIN-FILM YBCO

D.A. Kolosovsky1, S.A. Ponomarev2, Yu.A. Zhivodkov2, V.A. Golyashov2, S.R. Yegiyan3, S.V. Starinskiy1
1Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
3Skolkovo Institute of Science and Technology, Moscow, Russia
Keywords: heat flux sensor, YBCO, pulsed laser deposition, transverse thermoelectric effect

Abstract

This work presents the design and experimental investigation of a prototype heat flux sensor based on a thin YBaCuO film deposited by pulsed laser deposition onto single-crystal Al2O3(1̅102) substrates. A technologically simple approach is proposed for producing oriented YBCO films without expensive miscut substrates, enabling the realization of the transverse thermoelectric effect. Comprehensive studies of the morphology, phase composition, and thermoelectric properties of the films deposited at various substrate temperatures are carried out. The sensor prototype fabricated from the film grown at 700 °C demonstrates the maximum sensitivity of 177 μV∙cm2/W, comparable to that of reference water-cooled sensors.