SENSITIVE ELEMENTS OF OPTICAL-ACOUSTIC TRANSDUCERS (REVIEW)
P. E. Kotlyar, O.I. Potaturkin
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: membrane, geometry, sensitivity, corrugation, perforation, graphene, cantilever, deflection, deflection registration
Abstract
Optical-acoustic transducers (OAPs) can be used in all applications of applied optics, where precision measurements of the electromagnetic radiation power are required. They belong to thermal volumetric receivers of the "full spectrum" have a constant spectral sensitivity in a very wide range (0.3-10000 microns), and allow measuring both constant fluxes of electromagnetic radiation with a power of 10-11 W with a dynamic range of 80 dB, and femtosecond terawatt laser pulses. The metrological parameters of OAPs are mainly determined by the design of the sensing elements performing the acoustic-mechanical transformation. The methods of increasing the sensitivity of the classical membrane sensing elements through the use of new materials, optimization of geometry, corrugation and edge perforation, as well as the use of cantilevers as new highly sensitive elements of pressure sensors are analyzed. The limiting capabilities of both classical and new methods of precision measurements of the deformation of a sensitive element of an OAP caused by the pressure of an expanding gas are presented.
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