EXPERIMENTAL INVESTIGATION OF THE NONLINEAR PHOTOTHERMAL EFFECT IN THE PROCESS OF LASER ABLATION OF OXIDE FILMS WITH DIFFERENT THERMAL CONDUCTIVITY COEFFICIENTS
S. D. Poletayev, G. V. Uspleniev
Image Processing Systems Institute, NRC "Kurchatov Institute", Samara, Russia
Keywords: laser ablation, diffraction optical element, surface periodic microstructures, nanopillars, nonlinear photothermal effect, resolution
Abstract
The nonlinear photothermal effect that occurs during local laser ablation of metal oxide films with different thermal conductivity coefficients is investigated. It is shown that the track width decreases monotonously with a change in the thermal conductivity coefficient in the range from 25 to 1 W/(m∙K). It is found that a moderate decrease in the thermal conductivity of the film does not lead to a significant decrease in the track width. The conclusion is made about a combined effect of the thermal conductivity coefficient and the thermal acceleration factor on the minimum track width, which introduces additional nonlinearity into the oxide film heating process.
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