APPLICATION OF THE IMAGE CORRELATION METHOD FOR DETERMINATION OF THE LOCATION AND SIZE OF ROUND-SHAPED OBJECTS
A. A. Golitsyn1,2,3, S. A. Golitsyn3, N. A. Seyfi1
1Design and Technology Institute of Applied Microelectronics, Novosibirsk Branch of the Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
3Novosibirsk State University, Novosibirsk, Russia
Keywords: convolution, cross correlation, image processing, ball-bonding diagnostics
Abstract
The article proposes a technique to identify the location of the round-shaped object in the image and to calculate its diameter. The technique is based on calculating the cross-correlation values of the analyzed image and several specific pattern images and on the subsequent analysis which of the patterns and for what its position relative to the inspected image is the most suitable one. The technique allows one not only to calculate the object size and coordinates, but also to determine the actual presence or absence of the object in the field of view. The feasibility and practical applicability of the technique are shown using an example of inspecting the ball-type wire bonding to the surface of a die in integrated circuits. The algorithm can be used as a part of software for non-destructive testing systems intended to inspect semiconductor products during their manufacturing before casing them. In particular, the algorithm allows one to check if there is a ball-type wire bonding at the place where it should be and to determine if both the location of the ball and its diameter are acceptable.
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