RESEARCH OF SCANNING NON-UNIFORMITY IN OPTICAL INTERFERENCE MICROSCOPE
I. A. Vykhristyuk, R. V. Kulikov, E. V. Sysoev
Technological Design Institute of Scientific Instrument Engineering, SB RAS, Novosibirsk, Russia
Keywords: scanning of interference phase, interference measurements, scanning non-uniformity
Abstract
The paper presents the results of a study of scanning irregularity in an optical interference microscope, performed both by a micrometer stage and a piezoceramic actuator. Registration of interference during the scanning process was carried out with a high-speed digital video camera, which allowed us to register the interference signal in detail. The obtained scanning results show the non-uniformity of the distances between adjacent interference fringes along the reference axis ─ the frame number. The procedure is presented that significantly decrease the value of non-uniformity. Application of such procedure allows to form a metric scale along scanning axis which can be used at performing high accuracy interference measurements of surface microrelief.
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