AFM VISUALIZATION OF CONDUCTIVITY AND MORPHOLOGY OF BCx-FILM SURFACE OBTAINED BY SLD METHOD
P. V. Zinin1, A. A. Bykov1, R. I. Romanov2, A. A. Korneeva1, A. V. Andreev1, A. Yu. Belykh1, S. Yu. Krasnoborodko1, V. A. Kukushkin1
1Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences, Moscow, Russia
2National Research Nuclear University MEPhI, Moscow, Russia
Keywords: laser deposition, BC, diamond-like films, conductive films
Abstract
Materials with non-standard physical properties are widely used in various fields of science and technology, from microelectronics to heavy industrial installations. International scientific teams carried out mathematical calculations showing that the most promising compounds of B-C structures, which have strong chemical sp2- and sp3-bonds under certain external conditions and concentration ratios. Such materials are characterized by high hardness, resistance to aggressive media, and electrical conductivity. This study is aimed at synthesizing and investigating carbon-containing BCx films. The paper presents the results of measuring a thin BC5 film. The spectral characteristics of the film, data on the layer thickness, conductivity, and composition of the film are obtained using X-ray, Raman, and photoelectron spectroscopy.
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