GOLD DROPLET FORMATION AND MOVEMENT OVER A SI(111) SURFACE: MONTE CARLO SIMULATION
S. V. Kudrich1, A. A. Spirina2, N. L. Shwartz1,2
1Novosibirsk State Technical University, Novosibirsk, Russia
2Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: gold, Si(100), Si(111), simulation, Monte-Carlo
Abstract
This work presents the Monte Carlo simulation results of gold droplet movement over a vicinal Si(111) surface during the gold deposition. The behavior of gold droplets on a singular silicon surface with (111) and (100) orientations is considered. It is found that the directional droplet motion on the vicinal Si(111) surface is caused by the asymmetry of lateral facets at the liquid-crystal interface. The asymmetry of lateral facets is caused by the presence of steps on the vicinal Si(111) surface. The reason for the gold droplet movement is the silicon substrate dissolution in the tendency to reach the Au-Si melt equilibrium concentration in the droplet bulk. The kinetics of Au-Si droplet movement on the silicon surface is analyzed.
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