EXTENSION OF THE PERMISSIBLE LIMITS OF THE CURVATURE OF AXISYMMETRIC 3D SURFACES WHEN RECORDING THE MICRORELIEF
V.P. Kiryanov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Science, Novosibirsk, Russia
Keywords: automatic focusing, 3D optical surfaces, Foucault knife, defocus sensor
Abstract
Functioning of the system for automatic focusing of technological lasers on optical 3D surfaces, implemented in the optical recording head of the LGI-2 model laser image generator, is analyzed. The reasons for serious restrictions on the allowable inclination of the recording surface are discussed. An alternative solution is proposed that makes it possible to significantly increase the permissible angle of inclination of axisymmetric surfaces on which the topology of microstructures should be recorded.
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