BROADBAND ANTIREFLECTION COATING COMPOSED OF RESONANT SIGE PARTICLES OF SUBWAVELENGTH SIZE
D. E. Utkin1,2, A. V. Tsarev1,2, E. N. Utkin3, A. V. Latyshev1,2, A. A. Shklyaev1,2
1A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Novosibirsk, Russia
2Novosibirsk State University, Novosibirsk, Russia
3Institute of Automation and Electrometry, SB RAS, Novosibirsk, Russia
Keywords: metasurfaces, SiGe particles on Si, Mie resonances, antireflection properties, numerical simulation, FDTD method
Abstract
The antireflection properties of coatings composed of subwavelength-sized dielectric SiGe particles grown on Si(100) substrates using the dewetting phenomenon are studied. The average particle size was set by the amount of deposited Ge and varied in the range from 0.2 to 1.4 μm. The excitation of magnetic and electric resonances in the SiGe particles led to a decrease in reflection by approximately 60%, depending on the average particle size, in comparison with the reflection of the Si surface not covered with particles. The broad particle size distribution provided the antireflection properties over a wide spectral range, in which small particles produced a stronger antireflection effect than large particles. Numerical simulation has shown that for particles on a substrate, the efficiency of excitation of magnetic and electric resonances strongly depends on the ratio of the height of the particles to the size at their base.
|
