REVIEW OF INTEGRATED-OPTICAL SENSORS ON SILICON: FORECASTS AND RESULTS OF THE DECADE (INVITED PAPER)
A. V. Tsarev1,2
1Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk State University, Novosibirsk, Russia
Keywords: кремний-на-изоляторе, оптический сенсор, канальный волновод, щелевой волновод, оптический резонатор, фотонный кристалл, субволновая решётка, решёточный элемент связи, эффект Вернье, silicon on insulator, optical sensor, channel waveguide, slot waveguide, optical cavity, photonic crystal, sub-wavelength grating, grating coupler, Vernier effect
Abstract
Silicon photonics is an important technological platform for the development of various functional optical devices, including perspective types of optical sensors. During the last years, 20% of all publications related to silicon photonics deal with the development of various variants of optical sensors. Their advantage is in the combination of high technical parameters with the possibility of mass production by CMOS compatible technology of microelectronics and nanophotonics. The present review offers a short description of various technological solutions of the last decade responsible for the progress in improving the performances of optical sensors. Special attention is given to new perspective constructions of sensors based on the bimodal technology promising substantial growth of sensitivity owing to equalization of the group delay of different optical modes propagating along the waveguide structure. The review will be useful to Russian and foreign researchers working with sensors.
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