GIGAHERTZ MEMS GENERATOR OF CLOCK FREQUENCY
E. G. Kostsov, A. A. Sokolov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Koptyuga, 1
Keywords: генератор частоты, автоколебания, устойчивый предельный цикл, математическая модель, clock frequency generator, self-supported oscillations, stable limiting cycle, mathematical model
Abstract
An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS generator of clock frequency capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 106g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.
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