IMPLEMENTATION OF TERAHERTZ HIGH-PASS FILTERS BASED ON ALL-METAL MICROSTRUCTURES USING DEEP X-RAY LITHOGRAPHY
A. N. Gentselev1, S. A. Kuznetsov1,2,3, F. N. Dul’tsev3,4, B. G. Gol’denberg1, A. G. Zelinskii5, V. I. Kondrat'ev1, D. S. Tanygina2,6
1Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Lavrent'eva, 11
2Design and Technology Institute of Applied Microelectronics, 630090, Novosibirsk, prosp. Akademika Lavrent'eva, 2/1
3Novosibirsk State University, 630090, Novosibirsk, ul. Pirogova, 2
4Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Lavrent'eva, 13
5Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, 630128, Novosibirsk, ul. Kutateladze, 18
6Far-Eastern Federal University, 690091, Vladivostok, ul. Sukhanova, 8
Keywords: Глубокая рентгеновская литография, LIGA-технология, микроструктуры, квазиоптические фильтры, терагерцовый диапазон, deep X-ray lithogrphy, LIGA technology, microstructures, quasioptical filters, terahertz range
Abstract
A technique for designing high-pass terahertz quasioptical filters based on thick (up to 1 mm in thickness) self-supporting copper microstructures of subwave topology. The technique is based on the X-ray lithographic formation of a high-aspect resistive mask made of the SU-8 X-ray resist on a silicon substrate with the use of a tungsten X-ray pattern and subsequent galvanic growing of a copper layer through the resistive mask. The example of a 212-$\mu$m thick structure with a cutoff frequency of 0.42 THz having the topology of hexagonally packed hex-shaped holes is described. The results of the broadband THz characterization of the structure obtained and its electrodynamic analysis are presented.
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