Measuring the Temperature and Concentration Secondary Electrons in an Argon Electron-Beam Plasma
V. O. Konstantinov, V. G. Shchukin, R. G. Sharafutdinov
Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia
Keywords: зондовая диагностика, электронно-пучковая плазма, электронная пушка с полым катодом, probe diagnostics, electron-beam plasma, hollow cathode electron gun
Abstract
The results of temperature and concentration measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmotron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a transverse size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.
|
