OPTOELECTRONIC SYSTEM FOR STUDYING NANODISPLACEMENTS OF MOVING MEMS ELEMENTS
E. G. Kostsov, A. I. Skurlatov, A. M. Shcherbachenko
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Koptyuga, 1
Keywords: оптико-электронная система, гетеродинный лазерный интерферометр, акустооптический модулятор лазерного излучения, подвижный элемент MEMS, optoelectronic system, heterodyne laser interferometer, acousto-optical modulator of laser radiation, moving MEMS element
Abstract
An experimental structure of an optoelectronic system for contactless measurements of micro- and nanodisplacements of moving MEMS elements is considered.The system is based on a heterodyne interferometer with a frequency-stabilized He-Ne laser and an acousto-optical modulator of laser radiation. A resolution of less than 1 nm in terms of the moving element displacement is reached in experiments by applying voltage pulses with amplitudes up to 1 V on the MEMS structure; moreover, the displacement amplitude is found to be a linear function of the control voltage with sensitivity of 100-200 nm/V. No hysteresis is observed on the curve plotted in the coordinates of the element location and control voltage.
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