DEVICE FOR RECORDING THE DIFFRACTION PATTERN OF SYNTHESIZED HOLOGRAMS IN A WIDE ANGULAR RANGE
D. A. Belousov, A. G. Poleshchuk, V. N. Khomutov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, pr. Akademika Koptyuga, 1
Keywords: дифракционная оптика, синтезированные голограммы, компьютерная оптика, обработка изображений, измерительные системы, diffraction optics, synthesized holograms, computer optics, image processing, measurement systems
Abstract
Results of the development and testing of a device for recording and analyzing the diffraction pattern of synthesized holograms are reported. It is demonstrated that this device allows recording of the diffraction pattern of radiation reflected from the surface microrelief of the considered element or transmitted through it in the angular range of diffraction of the order of ±90º and 360º in terms of the azimuthal angle. A possibility of determining the periods, duty ratio, and angular orientation of diffraction structures and also the diffraction efficiency of all diffraction orders of the examined element is described. The device is designed for real-time monitoring of the microrelief depth and shape of synthesized holograms in the course of their fabrication.
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